FRT GmbH launches the MicroProf® DI ? inspection and metrology in one flexible platform!

Fully automated wafer inspection for semiconductor and MEMS industries

ID: 1557303
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(PresseBox) - FRT GmbH introduced the MicroProfera and high-precision microscope station, as well as comprehensive multi-sensor metrology with different topography and layer thickness sensors. The determination of defects down to sub-?m range can be performed fast and reliable.

The optical inspection tool MicroProf

MicroProf

reliable platform, including highly flexible software

development and qualification of new customer processes

modules that can be flexibly combined on the same tool platform

covering all wafer surfaces at high throughput for efficient process control

The tool provides high throughput and perfectly fits in any HVM wafer fab. The core component is the worldwide established multi-sensor tool MicroProf

Our defect inspection software provides effective visualization, versatile processing and fast generation of wafer maps as well as precise quantification and comprehensible documentation of defects.

The unique MicroProf

Contact us if you have any questions or visit our website.

+49 2204 84 3205

info(at)frt-gmbh.com

https://frtmetrology.com/

FRT is one of the world?s leading suppliers of 3D metrology and inspection for R&D and high-volume manufacturing. The FRT MicroProf

A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.

The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD ? and many other parameters, contact-free and fully automated.



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FRT is one of the world?s leading suppliers of 3D metrology and inspection for R&D and high-volume manufacturing. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD? and many other parameters, contact-free and fully automated.

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Date: 04/06/2020 - 08:02
Language: English
News-ID 1557303
Character count: 3021
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Firma: FRT GmbH
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Stadt: Bergisch Gladbach
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