MV Multi-Trap(R) Vacuum Pump Inlet Trap Stacks for 300 mm Wafer Fabrication Processes
(firmenpresse) - NORTH BILLERICA, MA -- (Marketwire) -- 03/19/13 -- has announced that their high-capacity, modular vacuum pump inlet-exhaust traps can be stacked for semiconductor wafer fabrication processes which produce a lot of heavy particulates.
The is a robust that can be stacked for 300 mm semiconductor wafer fabricators utilizing LPCVD, PECVD, and ALD processing. Featuring all stainless steel construction with a first stage knock-down baffle, two stacked traps can accumulate up to 2,500 cu. in. of solids, depending upon the process.
Increasing the number of wafer processing runs between maintenance intervals, two stacked MV Multi-Trap® 12" provide six stages of user-selectable filter elements. include stainless steel and copper gauze, molecular sieve, activated alumina or charcoal, micro-rated pleated polypropylene, and Sodasorb®.
The MV Multi-Trap® 12" Vacuum Inlet Trap is priced from $2,495.00 per module. are available upon request.
About Mass-Vac, Inc.
Protecting vacuum pumps, people and the environment, was founded in 1971 to serve customers in need of vacuum pump support and service. After years of field experience and analyzing the reasons why they failed, along with extensive research and development, the MV Products division was created. MV Products manufactures a complete line of , exhaust traps, , and for a wide range of manufacturing, laboratory, and commercial applications including universities and hospitals.
Mass-Vac, Inc. specializes in solving the process contamination problems associated vacuum systems that are used with processes such as MOCVD, HVPE, PECVD, or LPCVD which generate high volumes of particulates. These processes, of course, are used in manufacturing green products such as solar cells, HB-LEDs, and Li-Ion batteries. Mass-Vac, Inc. is an active member of SEMI and the American Vacuum Society.
Image Available:
For more information contact:
MV Products, Division of Mass-Vac, Inc.
Herbert R. Gatti
Marketing
247 Rangeway Rd.
P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393
FAX (978) 671-0014
e-mail: (tech contact)
Themen in dieser Pressemitteilung:
Unternehmensinformation / Kurzprofil:
Datum: 19.03.2013 - 08:01 Uhr
Sprache: Deutsch
News-ID 1208260
Anzahl Zeichen: 0
contact information:
Contact person:
Town:
NORTH BILLERICA, MA
Phone:
Kategorie:
Micro-electronics & Nanotechnology
Anmerkungen:
Diese Pressemitteilung wurde bisher 157 mal aufgerufen.
Die Pressemitteilung mit dem Titel:
"MV Multi-Trap(R) Vacuum Pump Inlet Trap Stacks for 300 mm Wafer Fabrication Processes
"
steht unter der journalistisch-redaktionellen Verantwortung von
MV Products (Nachricht senden)
Beachten Sie bitte die weiteren Informationen zum Haftungsauschluß (gemäß TMG - TeleMedianGesetz) und dem Datenschutz (gemäß der DSGVO).
