ASM Enables Power Devices with new PowerFill(TM) Epitaxial Technology
(Thomson Reuters ONE) - Fairchild First to Qualify PowerFill for ProductionALMERE, The Netherlands, January 20, 2010 -ASM International N.V. (www.asm.com) (NASDAQ: ASMI and Euronext Amsterdam: ASM), todayintroduced its PowerFill(TM) epitaxial silicon (Epi Si) trench fill process.The new process enables void free filling of deep trenches with doped, epitaxialsilicon. PowerFill is an enabling process technology as it is about 3 timesfaster than competing processes, reducing manufacturing costs and creating anadditional degree of freedom in power device design.Fairchild Semiconductor is the first customer to qualify the process for itsadvanced power management devices, having completed verification at its fab inKorea. For this application, ASM's PowerFill process enables power managementdevices and circuits to be realized in a smaller footprint thereby reducing diecost and form factor."Requirements on discrete power MOSFETs are demanding lower on-resistance, lowergate charge and higher current capability," said C.B. Son, Fairchild's Directorof Process Technology. "The Epsilon tool's performance with PowerFill has beenimpressive and was a significant enabling factor as we have worked to integratethis advanced trench Epi process, allowing us to realize considerable costsavings as a result of its significant improvement in process throughput."Compared to alternative processes that require multiple passes through anepitaxy reactor to realize a similar device structure, the innovative trenchfill technique developed in the ASM Epsilon® system enables a void free Epiprocess in a single deposition step. The single step process is able to triplethe throughput for the epitaxial Si process, while maintaining void free fillingcharacteristics, good uniformity and high yield. "The development of thishigh-speed trench fill process is yet another example of how ASM works with itscustomers to enable advanced materials and epitaxy processes in high-volumemanufacturing," said Shawn Thomas, Director of Epi Technology at ASM.About ASMASM International N.V. and its subsidiaries design and manufacture equipment andmaterials used to produce semiconductor devices. The company provides productionsolutions for wafer processing (Front-end segment) as well as assembly andpackaging (Back-end segment) through facilities in the United States, Europe,Japan and Asia. ASM International's common stock trades on NASDAQ (symbol ASMI)and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information,visit ASMI's web site at www.asm.com.Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of1995: All matters discussed in this statement, except for any historical data,are forward-looking statements. Forward-looking statements involve risks anduncertainties that could cause actual results to differ materially from those inthe forward-looking statements. These include, but are not limited to, economicconditions and trends in the semiconductor industry generally and the timing ofthe industry cycles specifically, currency fluctuations, the timing ofsignificant orders, market acceptance of new products, competitive factors,litigation involving intellectual property, shareholder and other issues,commercial and economic disruption due to natural disasters, terrorist activity,armed conflict or political instability, epidemics and other risks indicated inthe Company's filings from time to time with the U.S. Securities and ExchangeCommission, including, but not limited to, the Company's reports on Form 20-Fand Form 6-K. The Company assumes no obligation nor intends to update or reviseany forward-looking statements to reflect future developments or circumstances.Contacts:Erik Kamerbeek+31 88 100 8500Mary Jo Dieckhaus+1 212 986 2900[HUG#1375314]
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Datum: 20.01.2010 - 11:01 Uhr
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